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"Reducing residual vibrations through iterative learning control, with ..."

Casper L. van Oosten, Okko H. Bosgra, Branko G. Dijkstra (2004)

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DOI: 10.23919/ACC.2004.1384669

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-24

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  dblp key:
  - conf/amcc/OostenBD04
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Casper L. van Oosten, Okko H. Bosgra, Branko G. Dijkstra:
Reducing residual vibrations through iterative learning control, with application to a wafer stage. ACC 2004: 5150-5155

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