"High-speed high-precision control of atomic force microscope by surface ..."

Takayuki Shiraishi, Hiroshi Fujimoto (2009)

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DOI: 10.1109/ACC.2009.5160749

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-06

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Takayuki Shiraishi, Hiroshi Fujimoto:
High-speed high-precision control of atomic force microscope by surface topography learning observer. ACC 2009: 961-966

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