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"Multivariable model predictive control of thin film surface roughness and ..."

Xinyu Zhang, Gerassimos Orkoulas, Panagiotis D. Christofides (2011)

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DOI: 10.1109/ACC.2011.5991182

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-08

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Xinyu Zhang, Gerassimos Orkoulas, Panagiotis D. Christofides:
Multivariable model predictive control of thin film surface roughness and slope: Application to a 2D kinetic Monte-Carlo model. ACC 2011: 2546-2551

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