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"Development and characterization of TaN thin film resistor with CMOS ..."

Xiaoxu Kang et al. (2017)

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DOI: 10.1109/ASICON.2017.8252436

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-12

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Xiaoxu Kang, Limin Zhu, Xingwang Zhu, Qingyun Zuo, Xiaolan Zhong, Shoumian Chen, Yuhang Zhao, Shanshan Liu, Hanwei Lu, Jianmin Wang, Wei Wang, Bo Zhang:
Development and characterization of TaN thin film resistor with CMOS compatible fabrication process. ASICON 2017: 160-162

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