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"Virtual metrology for semiconductor manufacturing: Focus on transfer learning."

Rebecca Clain et al. (2021)

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DOI: 10.1109/CASE49439.2021.9551567

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Rebecca Clain, Valeria Borodin, Michel Juge, Agnès Roussy:
Virtual metrology for semiconductor manufacturing: Focus on transfer learning. CASE 2021: 1621-1626

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