"Performance assessment of virtual metrology in APC applications for the ..."

Keung Hui, Jason Mou (2014)

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DOI: 10.1109/COASE.2014.6899410

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Keung Hui, Jason Mou:
Performance assessment of virtual metrology in APC applications for the viability of sampling reductions. CASE 2014: 750-755

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