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"Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under ..."

Robert W. Johnstone, M. Parameswaran (2006)

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DOI: 10.1109/CCECE.2006.277827

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Robert W. Johnstone, M. Parameswaran:
Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under Differing Residual Stresses. CCECE 2006: 1617-1620

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