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"Model-based Temperature Control of a Continuous Flow Heater for Efficient ..."

Martin Kleindienst, Stefan Koch, Markus Reichhartinger (2020)

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DOI: 10.1109/CCTA41146.2020.9206290

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-07

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Martin Kleindienst, Stefan Koch, Markus Reichhartinger:
Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers. CCTA 2020: 1-6

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