"Feedback control of growth rate and surface roughness in thin film growth."

Yiming Lou, Panagiotis D. Christofides (2003)

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DOI: 10.1109/CDC.2003.1272671

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-07

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Yiming Lou, Panagiotis D. Christofides:
Feedback control of growth rate and surface roughness in thin film growth. CDC 2003: 845-850

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