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"MEMS for telecommunications: devices and reliability."

Chorng-Ping Chang (2003)

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DOI: 10.1109/CICC.2003.1249390

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-15

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Chorng-Ping Chang:
MEMS for telecommunications: devices and reliability. CICC 2003: 199-206

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