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"Detailed routing for spacer-is-metal type self-aligned double/quadruple ..."

Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak (2015)

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DOI: 10.1145/2744769.2744821

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak:
Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. DAC 2015: 69:1-69:6

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