"Improved Tunability of BEoL-integrated Hafnium Zirconium Oxide Varactors ..."

Sukhrob Abdulazhanov et al. (2024)

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DOI: 10.1109/DRC61706.2024.10605286

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-16

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Sukhrob Abdulazhanov, Q. H. Le, David Lehninger, Ayse Sünbül, Thomas Kämpfe, G. Gerlach:
Improved Tunability of BEoL-integrated Hafnium Zirconium Oxide Varactors for mmWave Applications. DRC 2024: 1-2

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