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"Engineering wafers for the nanotechnology era."

Carlos Mazure, Andre-Jacques Auberton-Herve (2005)

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DOI: 10.1109/ESSCIR.2005.1541554

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-28

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  - conf/esscirc/MazureA05
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  - https://dblp.org/rec/conf/esscirc/MazureA05
Carlos Mazure, Andre-Jacques Auberton-Herve:
Engineering wafers for the nanotechnology era. ESSCIRC 2005: 29-38

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