BibTeX record conf/essderc/ChiarellaKRRHEK16

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  author    = {Thomas Chiarella and
               S. Kubicek and
               E. Rosseel and
               Romain Ritzenthaler and
               Andriy Hikavyy and
               P. Eyben and
               A. De Keersgieter and
               L.{-}{\AA}. Ragnarsson and
               M.{-}S. Kim and
               S.{-}A. Chew and
               Tom Schram and
               S. Demuynck and
               Miroslav Cup{\'{a}}k and
               Luc Rijnders and
               Morin Dehan and
               Naoto Horiguchi and
               J{\'{e}}r{\^{o}}me Mitard and
               Dan Mocuta and
               Anda Mocuta and
               Aaron Voon{-}Yew Thean},
  title     = {Towards high performance sub-10nm finW bulk FinFET technology},
  booktitle = {46th European Solid-State Device Research Conference, {ESSDERC} 2016,
               Lausanne, Switzerland, September 12-15, 2016},
  pages     = {131--134},
  publisher = {{IEEE}},
  year      = {2016},
  url       = {},
  doi       = {10.1109/ESSDERC.2016.7599605},
  timestamp = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl    = {},
  bibsource = {dblp computer science bibliography,}
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