"Dual-Layer Proton Irradiation for Creating Thermally-Stable ..."

Hans Herdian et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631800

access: closed

type: Conference or Workshop Paper

metadata version: 2025-04-01

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Hans Herdian, Takeshi Inoue, Takuichi Hirano, Masatsugu Sogabe, Atsushi Shirane, Kenichi Okada:
Dual-Layer Proton Irradiation for Creating Thermally-Stable High-Resistivity Region in Si CMOS Substrate. ESSDERC 2021: 191-194

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