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"Design and fabrication of arrays of nanoelectromechanical resonators for ..."

Christian Bergaud et al. (2001)

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DOI: 10.1109/ETFA.2001.997699

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Christian Bergaud, Emeline Cocheteau, Matthieu Guirardel, Liviu Nicu, Benoit Belier:
Design and fabrication of arrays of nanoelectromechanical resonators for parallel detection of biomolecular interactions. ETFA (2) 2001: 305-308

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