"Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS ..."

Mehdi Ghommem et al. (2023)

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DOI: 10.1109/EUROCON56442.2023.10199044

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-17

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  - conf/eurocon/GhommemALEA23
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Mehdi Ghommem, Basil Alattar, Michael Lherbette, Alaaeldin Elhady, Eihab M. Abdel-Rahman:
Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators. EUROCON 2023: 632-637

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