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"Design and simulation of microstage having PZT MEMS actuator for 3D movement."
Kiran Junagal, Ram Swaroop Meena (2016)
- Kiran Junagal, Ram Swaroop Meena:
Design and simulation of microstage having PZT MEMS actuator for 3D movement. ICACCI 2016: 2180-2185
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