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"High-bandwidth control design for a piezoelectric nanopositioning stage."

Jinchuan Zheng, Minyue Fu (2011)

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DOI: 10.1109/ICCA.2011.6137902

access: closed

type: Conference or Workshop Paper

metadata version: 2020-03-16

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Jinchuan Zheng, Minyue Fu:
High-bandwidth control design for a piezoelectric nanopositioning stage. ICCA 2011: 760-765

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