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"Template-mask design methodology for double patterning technology."
Chin-Hsiung Hsu, Yao-Wen Chang, Sani R. Nassif (2010)
- Chin-Hsiung Hsu, Yao-Wen Chang, Sani R. Nassif:
Template-mask design methodology for double patterning technology. ICCAD 2010: 107-111
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