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"High aspect ratio MEMS capacitor for high frequency impedance matching ..."

Arda D. Yalcinkaya, Søren Jensen, Ole Hansen (2003)

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DOI: 10.1109/ICECS.2003.1301937

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-02

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  - conf/icecsys/YalcinkayaJH03
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Arda D. Yalcinkaya, Søren Jensen, Ole Hansen:
High aspect ratio MEMS capacitor for high frequency impedance matching applications. ICECS 2003: 918-921

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