"Model Free iterative learning for table motion control of lithography machine."

Yuting Li et al. (2023)

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DOI: 10.1109/ICISE60366.2023.00017

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-23

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Yuting Li, Ping Luo, Yunfeng Peng, Zhiyuan Liu:
Model Free iterative learning for table motion control of lithography machine. ICISE 2023: 47-50

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