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"Proposal of reducing impact force control system for scan stage with ..."

Kyota Tokuyama et al. (2013)

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DOI: 10.1109/ICMECH.2013.6519145

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-04

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Kyota Tokuyama, Hiroshi Fujimoto, Daisuke Yumiza, Kazuaki Saiki:
Proposal of reducing impact force control system for scan stage with decouplable structure of coarse and fine parts. ICM 2013: 810-815

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