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"Petri net-based deadlock avoidance for single-arm cluster tools with ..."

Yanjun Lu et al. (2018)

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DOI: 10.1109/ICNSC.2018.8361348

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-15

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  dblp key:
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Yanjun Lu, ChunRong Pan, Yan Qiao, Naiqi Wu, Yufeng Chen:
Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers. ICNSC 2018: 1-6

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