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"Novel high-resolution sidewall imaging using standard Atomic Force ..."

Florian Krohs, Sergej Fatikow (2013)

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DOI: 10.1109/ICSENST.2013.6727725

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-17

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Florian Krohs, Sergej Fatikow:
Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode. ICST 2013: 608-611

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