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"Direct ArF excimer laser microfabrication methods for polymer photonics."

Miltiadis Vasileiadis et al. (2014)

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DOI: 10.1109/ICTON.2014.6876317

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-16

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  - conf/icton/VasileiadisAAKV14
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  - https://dblp.org/rec/conf/icton/VasileiadisAAKV14
Miltiadis Vasileiadis, Loukas Athanasekos, Dimitris Alexandropoulos, Nikolaos Kehagias, Nikolaos Vainos:
Direct ArF excimer laser microfabrication methods for polymer photonics. ICTON 2014: 1-4

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