"Compact High-Performance Vibration Sensor Based on Single-Backplate MEMS ..."

Somu Goswami et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967323

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type: Conference or Workshop Paper

metadata version: 2024-10-06

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Somu Goswami, Christian Bretthauer, Andreas Bogner, Abhiraj Basavanna, Sebastian Anzinger, Marco Haubold, Gunar Lorenz, Johann Strasser, Daniel Weber, Lorenzo Servadei, Robert Wille:
Compact High-Performance Vibration Sensor Based on Single-Backplate MEMS Technology. IEEE SENSORS 2022: 1-4

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