"Feasibility analysis of a novel production method for monolithic ..."

Daniel Hohnloser et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808655

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-15

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Daniel Hohnloser, Denis Shuklin, Carsten Schmidt, Michael Kreitmaier, Mario Blasini, Amelie Hagelauer, Robert Weigel:
Feasibility analysis of a novel production method for monolithic integrated MEMS with nanogaps. IEEE SENSORS 2016: 1-3

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