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"Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride ..."

Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki (2022)

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DOI: 10.1109/SENSORS52175.2022.9967301

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/ieeesensors/NabaviMN22
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  - https://dblp.org/rec/conf/ieeesensors/NabaviMN22
Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki:
Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides. IEEE SENSORS 2022: 1-4

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