"Low-Bow Glass-Si Anodic Wafer Bonding at High Temperature by Means of CTE ..."

Ashkan Rad (2023)

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DOI: 10.1109/SENSORS56945.2023.10324950

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Ashkan Rad:
Low-Bow Glass-Si Anodic Wafer Bonding at High Temperature by Means of CTE Engineering of Corning Novel Fusion Glass. SENSORS 2023: 1-4

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