"Sensitivity Improvement of Micro Thermal Convective Accelerometer with ..."

Xiaoyi Wang et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956837

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Xiaoyi Wang, Gyuha Lim, Wei Xu, Yi-Kuen Lee:
Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization: Theoretical and Experimental Studies. IEEE SENSORS 2019: 1-4

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