"Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing ..."

M. Vimala Rani, Muthu Mathirajan (2015)

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DOI: 10.1109/IEEM.2015.7385617

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-03

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M. Vimala Rani, Muthu Mathirajan:
Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events. IEEM 2015: 104-108

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