"Carrot-like crystalline defects on the 4H-SiC powerMOSFET yield and ..."

Beatrice Carbone et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10117835

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Beatrice Carbone, Mario Santo Alessandrino, Alfio Russo, Elisa Vitanza, Filippo Giannazzo, Patrick Fiorenza, Fabrizio Roccaforte:
Carrot-like crystalline defects on the 4H-SiC powerMOSFET yield and reliability. IRPS 2023: 1-5

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