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"AC TDDB Analysis for HK/IL Gate Stack Breakdown and Frequency-dependent ..."

P. S. Chen et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764512

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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P. S. Chen, Y. W. Lee, D. S. Huang, S. C. Chen, C. F. Cheng, J. H. Lee, Jun He:
AC TDDB Analysis for HK/IL Gate Stack Breakdown and Frequency-dependent Oxygen Vacancy Trap Generation in Advanced nodes FinFET Devices by SILC Spectrum Methodology. IRPS 2022: 11

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