"Reliability Characteristics of a High Density Metal- Insulator-Metal ..."

Cheyun Lin et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9128312

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-25

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Cheyun Lin, Uygar E. Avci, M. A. Blount, Rohit Grover, Jeffery Hicks, R. Kasim, A. Kundu, C. M. Pelto, C. Ryder, Anthony Schmitz, K. Sethi, D. Seghete, D. J. Towner, A. J. Welsh, J. Weber, C. Auth:
Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel's 10+ Process. IRPS 2020: 1-4

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