"Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack ..."

Kashi Vishwanath Machani et al. (2015)

> Home

Details and statistics

DOI: 10.1109/IRPS.2015.7112789

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/irps/MachaniGBKP15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/irps/MachaniGBKP15
Kashi Vishwanath Machani, Holm Geisler, Dirk Breuer, Frank Kuechenmeister, Jens Paul:
Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack using finite element analysis and validation. IRPS 2015: 1

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.