"Electrostatical coupling-spring for micro-mechanical filtering applications."

Dimitri Galayko et al. (2003)

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DOI: 10.1109/ISCAS.2003.1205073

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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  - conf/iscas/GalaykoKBCC03
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Dimitri Galayko, Andreas Kaiser, Lionel Buchaillot, Dominique Collard, Chantal Combi:
Electrostatical coupling-spring for micro-mechanical filtering applications. ISCAS (3) 2003: 530-533

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