"A self-test on wafer level for a MEM gyroscope readout based on ..."

Sebastian Nessler, Maximilian Marx, Yiannos Manoli (2017)

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DOI: 10.1109/ISCAS.2017.8050332

access: closed

type: Conference or Workshop Paper

metadata version: 2017-10-07

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Sebastian Nessler, Maximilian Marx, Yiannos Manoli:
A self-test on wafer level for a MEM gyroscope readout based on ΔΣ modulation. ISCAS 2017: 1-4

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