"Geometrical Error Compensation of Gantry Stage Using Neural Networks."

Kok Kiong Tan et al. (2005)

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DOI: 10.1007/11427469_142

access: closed

type: Conference or Workshop Paper

metadata version: 2017-12-21

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  - conf/isnn/TanHPL05
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Kok Kiong Tan, Sunan Huang, V. Prahlad, Tong Heng Lee:
Geometrical Error Compensation of Gantry Stage Using Neural Networks. ISNN (3) 2005: 897-902

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