"An Ontology for Production Control of Semiconductor Manufacturing Processes."

Lars Mönch, Marcel Stehli (2003)

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DOI: 10.1007/978-3-540-39869-1_14

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Lars Mönch, Marcel Stehli:
An Ontology for Production Control of Semiconductor Manufacturing Processes. MATES 2003: 156-167

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