"An Ensemble Virtual Metrology Model of Machine Learning in Semiconductor ..."

Yawei Chen, Shaohua Chang, Eric Chien (2025)

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DOI: 10.1109/MCSOC67473.2025.00118

access: closed

type: Conference or Workshop Paper

metadata version: 2026-02-25

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Yawei Chen, Shaohua Chang, Eric Chien:
An Ensemble Virtual Metrology Model of Machine Learning in Semiconductor Manufacturing. MCSoC 2025: 734-739

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