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"Characterization of thin Boron layers grown on Silicon utilizing molecular ..."

Ahmed Elsayed, Jörg Schulze (2018)

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DOI: 10.23919/MIPRO.2018.8399821

access: closed

type: Conference or Workshop Paper

metadata version: 2019-11-28

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Ahmed Elsayed, Jörg Schulze:
Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions. MIPRO 2018: 7-11

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