"Thermal decomposition of silicon-rich oxides deposited by the LPCVD method."

Davor Ristic et al. (2011)

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type: Conference or Workshop Paper

metadata version: 2021-08-11

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Davor Ristic, Mile Ivanda, Kresimir Furic, Alessandro Chiasera, Enrico Moser, Maurizio Ferrari:
Thermal decomposition of silicon-rich oxides deposited by the LPCVD method. MIPRO 2011: 25-26

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