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"A monolithic 3D design technology co-optimization with back-end-of-line ..."

Jungyoun Kwak, Gihun Choe, Shimeng Yu (2022)

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DOI: 10.1145/3565478.3572312

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-15

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  dblp key:
  - conf/nanoarch/KwakCY22
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Jungyoun Kwak, Gihun Choe, Shimeng Yu:
A monolithic 3D design technology co-optimization with back-end-of-line oxide channel transistor. NANOARCH 2022: 6:1-6:6

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