"A novel integrated micro-scale closed synthetic-jet-like flow field as gas ..."

Fei Ding et al. (2009)

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DOI: 10.1109/NEMS.2009.5068644

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-13

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Fei Ding, Wenxuan Yu, Tingting Yu, Chao Ni, Ruyan Tang, Wengang Wu:
A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices. NEMS 2009: 567-571

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