"Low-temperature compatible electrostatic comb-drive actuators with ..."

Matthias Goldsche et al. (2014)

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DOI: 10.1109/NEMS.2014.6908802

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/nems/GoldscheKKNSGTM14
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  - https://dblp.org/rec/conf/nems/GoldscheKKNSGTM14
Matthias Goldsche, Tymofiy Khodkov, Pascal Kaienburg, Christoph Neumann, Christoph Stampfer, Stefan Trellenkamp, Gregor Mussler:
Low-temperature compatible electrostatic comb-drive actuators with integrated graphene. NEMS 2014: 251-255

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