"Design and simulation of corrugated diaphragm applied to the MEMS fiber ..."

Yiming Gui et al. (2016)

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DOI: 10.1109/NEMS.2016.7758220

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Yiming Gui, Yangxi Zhang, Guandong Liu, Yilong Hao, Chengchen Gao:
Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor. NEMS 2016: 152-155

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