"Design and fabrication of a mems capacitive accelerometer based on ..."

Qifang Hu et al. (2010)

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DOI: 10.1109/NEMS.2010.5592578

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Qifang Hu, Chengchen Gao, Yilong Hao, Dacheng Zhang, Guizhen Yan, Yangxi Zhang:
Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. NEMS 2010: 1036-1039

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