"Silicon carbide capacitive pressure sensors with arrayed sensing membranes."

Bo Meng et al. (2013)

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DOI: 10.1109/NEMS.2013.6559868

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-14

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Bo Meng, Wei Tang, Xuhua Peng, Haixia Zhang:
Silicon carbide capacitive pressure sensors with arrayed sensing membranes. NEMS 2013: 899-902

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