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"Design and fabrication of thin-film aluminum microheater and nickel ..."

Rungrueang Phatthanakun et al. (2012)

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DOI: 10.1109/NEMS.2012.6196735

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-02

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  - conf/nems/PhatthanakunDPSPC12
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Rungrueang Phatthanakun, P. Deekla, W. Pummara, C. Sriphung, C. Pantong, N. Chomnawang:
Design and fabrication of thin-film aluminum microheater and nickel temperature sensor. NEMS 2012: 112-115

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